TiN diffusion barrier failure by the formation of Cu3Si investigated by electron microscopy and atom probe tomography

Marlene Mühlbacher, Grzegorz Greczynski, Bernhard Sartory, Francisca Mendez Martin, Nina Schalk, Jun Lu, Lars Hultman, Christian Mitterer

Research output: Contribution to journalArticleResearchpeer-review

10 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-8
Number of pages8
JournalJournal of Vacuum Science and Technology B, JVSTB
Issue number2
Publication statusPublished - 19 Feb 2016

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