TiN diffusion barrier failure by the formation of Cu3Si investigated by electron microscopy and atom probe tomography

Marlene Mühlbacher; Grzegorz Greczynski; Bernhard  Sartory; Francisca Mendez Martin; Nina Schalk; Jun Lu; Lars Hultman; Christian Mitterer

doi:http://dx.doi.org/10.1116/1.4942003

TiN diffusion barrier failure by the formation of Cu3Si investigated by electron microscopy and atom probe tomography

Marlene Mühlbacher, Grzegorz Greczynski, Bernhard Sartory, Francisca Mendez Martin, Nina Schalk, Jun Lu, Lars Hultman, Christian Mitterer

Research output: Contribution to journal › Article › Research › peer-review

10 Citations (Scopus)

Original language	English
Pages (from-to)	1-8
Number of pages	8
Journal	Journal of Vacuum Science and Technology B, JVSTB
Volume	34
Issue number	2
DOIs	https://doi.org/10.1116/1.4942003
Publication status	Published - 19 Feb 2016

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http://dx.doi.org/10.1116/1.4942003

Cite this

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title = "TiN diffusion barrier failure by the formation of Cu3Si investigated by electron microscopy and atom probe tomography",

author = "Marlene M{\"u}hlbacher and Grzegorz Greczynski and Bernhard Sartory and {Mendez Martin}, Francisca and Nina Schalk and Jun Lu and Lars Hultman and Christian Mitterer",

year = "2016",

month = feb,

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doi = "http://dx.doi.org/10.1116/1.4942003",

language = "English",

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TY - JOUR

T1 - TiN diffusion barrier failure by the formation of Cu3Si investigated by electron microscopy and atom probe tomography

AU - Mühlbacher, Marlene

AU - Greczynski, Grzegorz

AU - Sartory, Bernhard

AU - Mendez Martin, Francisca

AU - Schalk, Nina

AU - Lu, Jun

AU - Hultman, Lars

AU - Mitterer, Christian

PY - 2016/2/19

Y1 - 2016/2/19

U2 - http://dx.doi.org/10.1116/1.4942003

DO - http://dx.doi.org/10.1116/1.4942003

M3 - Article

SN - 2166-2746

VL - 34

SP - 1

EP - 8

JO - Journal of Vacuum Science and Technology B, JVSTB

JF - Journal of Vacuum Science and Technology B, JVSTB

IS - 2

ER -