Thermal stability of magnetron sputtered Zr–Si–N films

R. Daniel, J. Musil, P. Zeman, C. Mitterer

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Translated title of the contributionThermal stability of magnetron sputtered Zr–Si–N films
Original languageEnglish
Pages (from-to)3368-3376
JournalSurface & coatings technology
Volume201
DOIs
Publication statusPublished - 2006

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