Translated title of the contribution | Thermal stability of magnetron sputtered Zr–Si–N films |
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Original language | English |
Pages (from-to) | 3368-3376 |
Journal | Surface & coatings technology |
Volume | 201 |
DOIs | |
Publication status | Published - 2006 |
Thermal stability of magnetron sputtered Zr–Si–N films
R. Daniel, J. Musil, P. Zeman, C. Mitterer
Research output: Contribution to journal › Article › Research › peer-review
41
Citations
(Scopus)