Thermal decomposition routes of CrN hard coatings synthesized by reactive arc evaporation and magnetron sputtering

Wolfgang Ernst, Jörg Neidhardt, Herbert Willmann, B. Sartory, Paul Heinz Mayrhofer, Christian Mitterer

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Translated title of the contributionThermal decomposition routes of CrN hard coatings synthesized by reactive arc evaporation and magnetron sputtering
Original languageEnglish
Pages (from-to)568-574
JournalThin solid films
Volume517
DOIs
Publication statusPublished - 2008

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