The sputter performance of an industrial-scale planar Mo-target over ist lifetime: target erosion and film properties

Martin Rausch, Asaf Sabag, Karl-Heinz Pichler, Georg Gruber, Judith Köstenbauer, Harald Köstenbauer, Patrice Kreiml, Megan J. Cordill, J Winkler, Christian Mitterer

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)1-14
JournalSurface & coatings technology
Issue number381
Publication statusPublished - 2019

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