Translated title of the contribution | The origin of stresses in magnetron sputtered thin films |
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Original language | English |
Title of host publication | Proceedings of 4th International Conference on Surface, coatings and Nanostructured Materials |
Pages | 44-44 |
Publication status | Published - 2009 |
The origin of stresses in magnetron sputtered thin films
Rostislav Daniel, Christian Mitterer, K.J. Martinschitz, Jozef Keckes
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution