The origin of stresses in magnetron sputtered thin films

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Translated title of the contributionThe origin of stresses in magnetron sputtered thin films
Original languageEnglish
Title of host publicationProceedings of 4th International Conference on Surface, coatings and Nanostructured Materials
Pages44-44
Publication statusPublished - 2009

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