The impact of nitrogen content and vacancies on structure and mechanical properties of Mo–N thin films

Fedor Klimashin, Nikola Koutna, H. Euchner, David Holec, Paul Mayrhofer

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title = "The impact of nitrogen content and vacancies on structure and mechanical properties of Mo–N thin films",

author = "Fedor Klimashin and Nikola Koutna and H. Euchner and David Holec and Paul Mayrhofer",

year = "2016",

doi = "http://dx.doi.org/10.1063/1.4966664",

language = "English",

pages = "185301--1 -- 185301--10",

journal = "Journal of applied physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

number = "120",

}

TY - JOUR

T1 - The impact of nitrogen content and vacancies on structure and mechanical properties of Mo–N thin films

AU - Klimashin, Fedor

AU - Koutna, Nikola

AU - Euchner, H.

AU - Holec, David

AU - Mayrhofer, Paul

PY - 2016

Y1 - 2016

U2 - http://dx.doi.org/10.1063/1.4966664

DO - http://dx.doi.org/10.1063/1.4966664

M3 - Article

SN - 0021-8979

SP - 185301-1 - 185301-10

JO - Journal of applied physics

JF - Journal of applied physics

IS - 120

ER -