The effect of the discharge power on target poisoning and microstructure - property relations of reactively sputtered TiN coatings

Christian Saringer, Robert Franz, Katrin Zorn, Christian Mitterer

Research output: Contribution to conferencePosterResearch

Original languageEnglish
Publication statusPublished - Dec 2015
EventMIATEC RSD 2015 - CNAM, Paris, France
Duration: 8 Dec 201511 Dec 2015

Conference

ConferenceMIATEC RSD 2015
Country/TerritoryFrance
CityParis
Period8/12/1511/12/15
  • MIATEC RSD 2015

    Christian Saringer (Participant)

    8 Dec 201511 Dec 2015

    Activity: Participating in or organising an eventParticipation in conference

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