Surface planarization and masked ion-beam structuring of YBa2Cu3O7 thin films

J.D. Pedarnig; K. Siraj; M.A. Bodea; I. Puica; W. Lang; R. Kolarova; P. Bauer; K. Haselgrübler; C. Hasenfuss; Igor Beinik; Christian Teichert

doi:10.1016/j.tsf.2010.07.021

Surface planarization and masked ion-beam structuring of YBa2Cu3O7 thin films

J.D. Pedarnig, K. Siraj, M.A. Bodea, I. Puica, W. Lang, R. Kolarova, P. Bauer, K. Haselgrübler, C. Hasenfuss, Igor Beinik, Christian Teichert

Chair of Physics (460)

Research output: Contribution to journal › Article › Research › peer-review

18 Citations (Scopus)

Translated title of the contribution	Surface planarization and masked ion-beam structuring of YBa2Cu3O7 thin films
Original language	English
Pages (from-to)	7075-7080
Journal	Thin solid films
Volume	518
DOIs	https://doi.org/10.1016/j.tsf.2010.07.021
Publication status	Published - 2010

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10.1016/j.tsf.2010.07.021

Cite this

@article{b55fbac6b81b416eaff5c7c35481dc6d,

title = "Surface planarization and masked ion-beam structuring of YBa2Cu3O7 thin films",

author = "J.D. Pedarnig and K. Siraj and M.A. Bodea and I. Puica and W. Lang and R. Kolarova and P. Bauer and K. Haselgr{\"u}bler and C. Hasenfuss and Igor Beinik and Christian Teichert",

year = "2010",

doi = "10.1016/j.tsf.2010.07.021",

language = "English",

volume = "518",

pages = "7075--7080",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier",

}

TY - JOUR

T1 - Surface planarization and masked ion-beam structuring of YBa2Cu3O7 thin films

AU - Pedarnig, J.D.

AU - Siraj, K.

AU - Bodea, M.A.

AU - Puica, I.

AU - Lang, W.

AU - Kolarova, R.

AU - Bauer, P.

AU - Haselgrübler, K.

AU - Hasenfuss, C.

AU - Beinik, Igor

AU - Teichert, Christian

PY - 2010

Y1 - 2010

U2 - 10.1016/j.tsf.2010.07.021

DO - 10.1016/j.tsf.2010.07.021

M3 - Article

SN - 0040-6090

VL - 518

SP - 7075

EP - 7080

JO - Thin solid films

JF - Thin solid films

ER -