Translated title of the contribution | Structure, stress and stress relaxation of TiN/Cu multilayer and nanocomposite coatings |
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Original language | English |
Publication status | Published - 2007 |
Event | Symposium on Reactive Sputter Deposition - Leoben, Austria Duration: 6 Dec 2007 → 7 Dec 2007 |
Conference
Conference | Symposium on Reactive Sputter Deposition |
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Country/Territory | Austria |
City | Leoben |
Period | 6/12/07 → 7/12/07 |