Structure, stress and stress relaxation of TiN/Cu multilayer and nanocomposite coatings

Harald Köstenbauer, Anna Maria Hofer, Gerardo Fontalvo, Christian Mitterer, Jozef Keckes

Research output: Contribution to conferencePosterResearchpeer-review

Translated title of the contributionStructure, stress and stress relaxation of TiN/Cu multilayer and nanocomposite coatings
Original languageEnglish
Publication statusPublished - 2007
EventSymposium on Reactive Sputter Deposition - Leoben, Austria
Duration: 6 Dec 20077 Dec 2007

Conference

ConferenceSymposium on Reactive Sputter Deposition
Country/TerritoryAustria
CityLeoben
Period6/12/077/12/07

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