Structure, stress, and mechanical properties of Mo-Al-N thin films deposited by dc reactive magnetron cosputtering: Role of point defects

Firat Angay, Lukas Löfler, Florent Tetard, Dominique Eyidi, Philippe Djemia, David Holec, Gregory Abadias

Research output: Contribution to journalArticleResearchpeer-review

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-14
JournalJournal of vacuum science & technology / A (JVST)
Volume2020
DOIs
Publication statusPublished - 2020

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