Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source

M. Kahn, M. Cekada, T Schoeberl, R. Berghauser, Christian Mitterer, C. Bauer, W Waldhauser, E. Brandstätter

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31 Citations (Scopus)
Translated title of the contributionStructural and mechanical properties of diamond-like carbon films deposited by an anode layer source
Original languageEnglish
Pages (from-to)6502-6507
JournalThin solid films
Volume517
Publication statusPublished - 2009

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