Stress measurement in thin films with the ion beam layer removal method: Influence of experimental errors and parameters

Stefan Massl, H. Köstenbauer, Jozef Keckes, Reinhard Pippan

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    Translated title of the contributionStress measurement in thin films with the ion beam layer removal method: Influence of experimental errors and parameters
    Original languageEnglish
    Pages (from-to)8655-8662
    JournalThin solid films
    Volume516
    Publication statusPublished - 2008

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