Sputtered molybdenum films: structure and property evolution with film thickness

Anna Maria Hofer, Josef Schlacher, Jozef Keckes, Jörg Winkler, Christian Mitterer

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30 Citations (Scopus)
Translated title of the contributionSputtered molybdenum films: structure and property evolution with film thickness
Original languageEnglish
Pages (from-to)149-152
JournalVacuum
Volume99
DOIs
Publication statusPublished - 2014

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