Sputter deposition of NiW films from a rotatable target

Martin Rausch, Mehran Golizadeh Najafabadi, Patrice Kreiml, Megan Cordill, Jörg Winkler, Christian Mitterer

Research output: Contribution to journalArticleResearchpeer-review

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)145616 1-7
JournalApplied surface science
DOIs
Publication statusPublished - 2020

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