Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry

Christopher Taudt, Bryan Nelsen, Elisabeth Rossegger, Sandra Schlögl, Edmund Koch, Peter Hartmann

Research output: Contribution to journalArticleResearchpeer-review

1 Citation (Scopus)
Original languageEnglish
Article number1152
JournalSensors (Basel, Switzerland)
Volume19
Issue number5
DOIs
Publication statusPublished - 7 Mar 2019
Externally publishedYes

Keywords

  • cross-linking characterization
  • dispersion-enhanced low-coherence interferometry
  • interferometry
  • photoresist
  • semiconductor manufacturing
  • white-light interferometry

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