Restrictions of wafer curvature stress measurements by thermally induced plastic substrate deformation

Research output: Contribution to conferencePresentationResearchpeer-review

Original languageEnglish
Publication statusPublished - 2015
EventE-MRS Spring Meeting 2015 - Lille, France
Duration: 11 May 201515 May 2015

Conference

ConferenceE-MRS Spring Meeting 2015
Country/TerritoryFrance
CityLille
Period11/05/1515/05/15

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