Restrictions of wafer curvature stress measurements by thermally induced plastic substrate deformation

Christian Saringer, Michael Tkadletz, Christian Mitterer

Research output: Contribution to conference › Presentation › Research › peer-review

Original languageEnglish
Publication statusPublished - 2015
EventE-MRS Spring Meeting 2015 - Lille, France
Duration: 11 May 2015 → 15 May 2015

Conference

ConferenceE-MRS Spring Meeting 2015
Country/TerritoryFrance
CityLille
Period11/05/15 → 15/05/15
  • 1 Participation in conference

  • E-MRS Spring Meeting 2015

    Christian Saringer (Speaker)

    11 May 2015 → 15 May 2015

    Activity: Participating in or organising an event › Participation in conference

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