Restrictions of stress measurements using the curvature method by thermally induced plastic deformation of silicon substrates

Research output: Contribution to journalArticleResearchpeer-review

11 Citations (Scopus)
Translated title of the contributionLimitierung der Spannungsmessung durch die Biegebalknemethode auf Grund thermisch aktivierter plastischer Verformung der Siliziumsubstrate
Original languageEnglish
Pages (from-to)68-75
Number of pages8
JournalSurface & coatings technology
Publication statusPublished - 25 Jul 2015

Cite this