Restrictions of stress measurements using the curvature method by thermally induced plastic deformation of silicon substrates

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11 Citations (Scopus)

Translated title of the contribution	Limitierung der Spannungsmessung durch die Biegebalknemethode auf Grund thermisch aktivierter plastischer Verformung der Siliziumsubstrate
Original language	English
Pages (from-to)	68-75
Number of pages	8
Journal	Surface & coatings technology
Volume	274
Publication status	Published - 25 Jul 2015

Cite this

@article{6d11bc3bf25641f1a497ebb74af77165,

title = "Restrictions of stress measurements using the curvature method by thermally induced plastic deformation of silicon substrates",

keywords = "Eigenspannung, Biegebalkenmethode, Hartstoffschichten, Substratverformung",

author = "Christian Saringer and Michael Tkadletz and Christian Mitterer",

year = "2015",

month = jul,

day = "25",

language = "English",

volume = "274",

pages = "68--75",

journal = "Surface & coatings technology",

issn = "0257-8972",

publisher = "Elsevier",

}

TY - JOUR

T1 - Restrictions of stress measurements using the curvature method by thermally induced plastic deformation of silicon substrates

AU - Saringer, Christian

AU - Tkadletz, Michael

AU - Mitterer, Christian

PY - 2015/7/25

Y1 - 2015/7/25

KW - Eigenspannung

KW - Biegebalkenmethode

KW - Hartstoffschichten

KW - Substratverformung

UR - http://www.sciencedirect.com/science/article/pii/S0257897215003734

M3 - Article

SN - 0257-8972

VL - 274

SP - 68

EP - 75

JO - Surface & coatings technology

JF - Surface & coatings technology

ER -