Photolithographic patterning of cellulose: a versatile dual-tone photoresist for advanced applications

Archim Wolfberger; Andreas Petritz; A. Fian; Jakob Herka; V. Schmidt; B. Stadlober; Rupert Kargl; Stefan Spirk; Thomas Grießer

doi:10.1007/s10570-014-0471-4

Photolithographic patterning of cellulose: a versatile dual-tone photoresist for advanced applications

Archim Wolfberger, Andreas Petritz, A. Fian, Jakob Herka, V. Schmidt, B. Stadlober, Rupert Kargl, Stefan Spirk, Thomas Grießer

Chair of Chemistry of Polymeric Materials (231)

Research output: Contribution to journal › Article › Research › peer-review

33 Citations (Scopus)

Translated title of the contribution	Photolithographic patterning of cellulose: a versatile dual-tone photoresist for advanced applications
Original language	English
Pages (from-to)	717-727
Number of pages	11
Journal	Cellulose
Volume	Volume 22
Issue number	Issue 1
DOIs	https://doi.org/10.1007/s10570-014-0471-4
Publication status	Published - 16 Oct 2014

Access to Document

10.1007/s10570-014-0471-4

Cite this

@article{eb53db035fca4b56b08cf95319c76db7,

title = "Photolithographic patterning of cellulose: a versatile dual-tone photoresist for advanced applications",

author = "Archim Wolfberger and Andreas Petritz and A. Fian and Jakob Herka and V. Schmidt and B. Stadlober and Rupert Kargl and Stefan Spirk and Thomas Grie{\ss}er",

year = "2014",

month = oct,

day = "16",

doi = "10.1007/s10570-014-0471-4",

language = "English",

volume = "Volume 22",

pages = "717--727",

journal = "Cellulose",

issn = "0969-0239",

publisher = "Springer Netherlands",

number = "Issue 1",

}

TY - JOUR

T1 - Photolithographic patterning of cellulose: a versatile dual-tone photoresist for advanced applications

AU - Wolfberger, Archim

AU - Petritz, Andreas

AU - Fian, A.

AU - Herka, Jakob

AU - Schmidt, V.

AU - Stadlober, B.

AU - Kargl, Rupert

AU - Spirk, Stefan

AU - Grießer, Thomas

PY - 2014/10/16

Y1 - 2014/10/16

U2 - 10.1007/s10570-014-0471-4

DO - 10.1007/s10570-014-0471-4

M3 - Article

SN - 0969-0239

VL - Volume 22

SP - 717

EP - 727

JO - Cellulose

JF - Cellulose

IS - Issue 1

ER -