Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target

Robert Franz; César Clavero; Rustem Bolat; Rueben Mendelsberg; A. Anders

doi:10.1088/0963-0252/23/3/035001

Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target

Robert Franz, César Clavero, Rustem Bolat, Rueben Mendelsberg, A. Anders

Chair of Functional Materials and Materials Systems (425)

Research output: Contribution to journal › Article › Research › peer-review

15 Citations (Scopus)

Translated title of the contribution	Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target
Original language	English
Pages (from-to)	0350011-03500111
Journal	Plasma sources science & technology (Plasma Sources Science and technology)
Volume	23
DOIs	https://doi.org/10.1088/0963-0252/23/3/035001
Publication status	Published - 2014

Access to Document

10.1088/0963-0252/23/3/035001

Cite this

@article{d1e1d4c4a68d477484b1edcb09287e3e,

title = "Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target",

author = "Robert Franz and C{\'e}sar Clavero and Rustem Bolat and Rueben Mendelsberg and A. Anders",

year = "2014",

doi = "10.1088/0963-0252/23/3/035001",

language = "English",

volume = "23",

pages = "0350011--03500111",

journal = "Plasma sources science & technology (Plasma Sources Science and technology)",

issn = "0963-0252",

publisher = "IOP Publishing Ltd.",

}

Franz, R, Clavero, C, Bolat, R, Mendelsberg, R & Anders, A 2014, 'Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target', Plasma sources science & technology (Plasma Sources Science and technology), vol. 23, pp. 0350011-03500111. https://doi.org/10.1088/0963-0252/23/3/035001

Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target. / Franz, Robert; Clavero, César; Bolat, Rustem et al.
In: Plasma sources science & technology (Plasma Sources Science and technology), Vol. 23, 2014, p. 0350011-03500111.

Research output: Contribution to journal › Article › Research › peer-review

TY - JOUR

T1 - Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target

AU - Franz, Robert

AU - Clavero, César

AU - Bolat, Rustem

AU - Mendelsberg, Rueben

AU - Anders, A.

PY - 2014

Y1 - 2014

U2 - 10.1088/0963-0252/23/3/035001

DO - 10.1088/0963-0252/23/3/035001

M3 - Article

SN - 0963-0252

VL - 23

SP - 350011

EP - 3500111

JO - Plasma sources science & technology (Plasma Sources Science and technology)

JF - Plasma sources science & technology (Plasma Sources Science and technology)

ER -