Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets

Julia Pachlhofer, Aitana Tarazaga Martin-Luengo, Robert Franz, Enrico Franzke, Harald Köstenbauer, Jörg Winkler, Alberta Bonanni, Silvia Mitterer, Christian Mitterer

Research output: Contribution to journalArticleResearchpeer-review

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)80-85
JournalSurface & coatings technology
Publication statusPublished - 2017

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