Original language | English |
---|---|
Pages (from-to) | 219-224 |
Number of pages | 6 |
Journal | International Journal of Refractory Metals and Hard Materials |
Volume | 62 |
DOIs | |
Publication status | Published - 1 Jan 2017 |
Keywords
- AlTiN
- HR-CVD
- Nanostructured coatings
Arno Köpf, Jozef Keckes, Juraj Todt, Reinhard Pitonak, Ronald Weissenbacher
Research output: Contribution to journal › Article › Research › peer-review
Original language | English |
---|---|
Pages (from-to) | 219-224 |
Number of pages | 6 |
Journal | International Journal of Refractory Metals and Hard Materials |
Volume | 62 |
DOIs | |
Publication status | Published - 1 Jan 2017 |