Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures

Nina Schalk, Jules Simonet Fotso, David Holec, Alexander Fian, Georg Jakopic, Velislava Terziyska, Rostislav Daniel, Christian Mitterer

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)1-9
Number of pages9
JournalJournal of physics / D, Applied physics
Volume49
DOIs
Publication statusPublished - 2016

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