Mechanical and chemical investigation of the interface between tungsten-based metallizations and annealed borophosphosilicate glass

B. Völker, W. Heinz, K. Matoy, R. Roth, J. M. Batke, T. Schöberl, M. J. Cordill, G. Dehm

Research output: Contribution to journalArticleResearchpeer-review

7 Citations (Scopus)
Original languageEnglish
Pages (from-to)170-176
Number of pages7
JournalThin solid films
Issue number1
Publication statusPublished - 2015


  • 4-point-bending
  • Interface
  • Interface energy release rate
  • Ti enrichment at interface
  • W-based metallization

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