Low Friction CrN/TiN multilayer coatings prepared by a hybrid high power impulse magnetron sputtering/DC magnetron sputtering deposition technique

Jörg Paulitsch, M. Schenkel, A. Schintlmeister, H. Hutter, Paul Heinz Mayrhofer

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34 Citations (Scopus)
Translated title of the contributionLow Friction CrN/TiN multilayer coatings prepared by a hybrid high power impulse magnetron sputtering/DC magnetron sputtering deposition technique
Original languageEnglish
Pages (from-to)5553-5557
JournalThin solid films
Volume518
DOIs
Publication statusPublished - 2010

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