Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited thin films

Anna Maria Hofer-Roblyek, Karl-Heinz Pichler, Christian Linke, Robert Franz, Jörg Winkler, Christian Mitterer

Research output: Contribution to journalArticleResearchpeer-review

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)354-359
JournalSurface & coatings technology
Publication statusPublished - 2018

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