Investigation on structure and properties of arc-evaporated HfAIN hard coatings

Robert Franz, Christian Mitterer, Markus Lechthaler, Conrad Polzer

Research output: Contribution to journal › Article › Research › peer-review

Translated title of the contribution	Investigation on structure and properties of arc-evaporated HfAIN hard coatings
Original language	English
Pages (from-to)	528-535
Journal	Journal of vacuum science & technology / A (JVST)
Publication status	Published - 2010

Cite this

@article{f0dd464b6d40433f88c5be5e67ed00c6,

title = "Investigation on structure and properties of arc-evaporated HfAIN hard coatings",

author = "Robert Franz and Christian Mitterer and Markus Lechthaler and Conrad Polzer",

year = "2010",

language = "English",

pages = "528--535",

journal = "Journal of vacuum science & technology / A (JVST)",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

}