Interfacial and inter- diffusion studies of epitaxial TiN/Cu layers on MgO (001) - A comprehensive approach by high resolution TEM and APT

Marlene Mühlbacher, Francisca Mendez Martin, B. Sartory, Jozef Keckes, J. Lu, Hultman Lars, Christian Mitterer

Research output: Contribution to conference › Presentation › Research › peer-review

Original language	English
Publication status	Published - 2013
Event	60th International AVS Symposium and Exhibition - Duration: 27 Oct 2013 → …

Conference	60th International AVS Symposium and Exhibition
Period	27/10/13 → …

60th International AVS Symposium and Exhibition
Marlene Mühlbacher (Speaker)
31 Oct 2013
Activity: Participating in or organising an event › Participation in conference

Cite this

@conference{06a698e232d84a838915c32dfd06f73d,

title = "Interfacial and inter- diffusion studies of epitaxial TiN/Cu layers on MgO (001) - A comprehensive approach by high resolution TEM and APT",

author = "Marlene M{\"u}hlbacher and {Mendez Martin}, Francisca and B. Sartory and Jozef Keckes and J. Lu and Hultman Lars and Christian Mitterer",

year = "2013",

language = "English",

note = "60th International AVS Symposium and Exhibition ; Conference date: 27-10-2013",

}

TY - CONF

T1 - Interfacial and inter- diffusion studies of epitaxial TiN/Cu layers on MgO (001) - A comprehensive approach by high resolution TEM and APT

AU - Mühlbacher, Marlene

AU - Mendez Martin, Francisca

AU - Sartory, B.

AU - Keckes, Jozef

AU - Lu, J.

AU - Lars, Hultman

AU - Mitterer, Christian

PY - 2013

Y1 - 2013

M3 - Presentation

T2 - 60th International AVS Symposium and Exhibition

Y2 - 27 October 2013

ER -