Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti–Al–N thin films

Helmut Riedl; F. Munnik; H. Hutter; Francisca Mendez Martin; S. Kolozsvari; M. Bartosik; Paul Heinz Mayrhofer; Christian Koller; Richard Rachbauer

doi:http://dx.doi.org/10.1016/j.tsf.2016.01.039

Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti–Al–N thin films

Helmut Riedl, F. Munnik, H. Hutter, Francisca Mendez Martin, S. Kolozsvari, M. Bartosik, Paul Heinz Mayrhofer, Christian Koller, Richard Rachbauer

Chair of Physical Metallurgy (420)

Institute of Materials Science and Technology

Research output: Contribution to journal › Article › Research › peer-review

19 Citations (Scopus)

Original language	English
Pages (from-to)	39-49
Number of pages	10
Journal	Thin solid films
Volume	603
DOIs	https://doi.org/10.1016/j.tsf.2016.01.039
Publication status	Published - 2016

Access to Document

http://dx.doi.org/10.1016/j.tsf.2016.01.039

Cite this

@article{2003215d71b845d3b5441744f6acef2e,

title = "Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti–Al–N thin films",

author = "Helmut Riedl and F. Munnik and H. Hutter and {Mendez Martin}, Francisca and S. Kolozsvari and M. Bartosik and Mayrhofer, {Paul Heinz} and Christian Koller and Richard Rachbauer",

year = "2016",

doi = "http://dx.doi.org/10.1016/j.tsf.2016.01.039",

language = "English",

volume = "603",

pages = "39--49",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier",

}

TY - JOUR

T1 - Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti–Al–N thin films

AU - Riedl, Helmut

AU - Munnik, F.

AU - Hutter, H.

AU - Mendez Martin, Francisca

AU - Kolozsvari, S.

AU - Bartosik, M.

AU - Mayrhofer, Paul Heinz

AU - Koller, Christian

AU - Rachbauer, Richard

PY - 2016

Y1 - 2016

U2 - http://dx.doi.org/10.1016/j.tsf.2016.01.039

DO - http://dx.doi.org/10.1016/j.tsf.2016.01.039

M3 - Article

SN - 0040-6090

VL - 603

SP - 39

EP - 49

JO - Thin solid films

JF - Thin solid films

ER -