Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT

Marlene Mühlbacher, Francisca Mendez Martin, B. Sartory, J. Lu, Nina Schalk, Hultman Lars, Christian Mitterer

Research output: Contribution to conference › Presentation › Research › peer-review

Original language	English
Publication status	Published - 2014
Event	nanoFIS Konferenz - Graz, Austria Duration: 3 Dec 2014 → 5 Dec 2014

NanoFIS
Marlene Mühlbacher (Speaker)
3 Dec 2014
Activity: Participating in or organising an event › Participation in conference

Cite this

@conference{5d2d6934336148f085f623597d31950c,

title = "Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT",

author = "Marlene M{\"u}hlbacher and {Mendez Martin}, Francisca and B. Sartory and J. Lu and Nina Schalk and Hultman Lars and Christian Mitterer",

year = "2014",

language = "English",

note = "nanoFIS Konferenz ; Conference date: 03-12-2014 Through 05-12-2014",

}