Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbOx film growth

Robert Franz, César Clavero, André Anders, Jonathan Kolbeck

Research output: Contribution to journal › Article › Research › peer-review

23 Citations (Scopus)

Original language	English
Pages (from-to)	1-11
Number of pages	11
Journal	Plasma sources science & technology (Plasma Sources Science and technology)
Volume	25
DOIs	https://doi.org/10.1088/0963-0252/25/1/015022
Publication status	Published - 2016

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title = "Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbOx film growth",

author = "Robert Franz and C{\'e}sar Clavero and Andr{\'e} Anders and Jonathan Kolbeck",

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T1 - Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbOx film growth

AU - Franz, Robert

AU - Clavero, César

AU - Anders, André

AU - Kolbeck, Jonathan

PY - 2016

Y1 - 2016

U2 - 10.1088/0963-0252/25/1/015022

DO - 10.1088/0963-0252/25/1/015022

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SN - 0963-0252

VL - 25

SP - 1

EP - 11

JO - Plasma sources science & technology (Plasma Sources Science and technology)

JF - Plasma sources science & technology (Plasma Sources Science and technology)

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