Influence of deposited metal structures on the failure mechanisms of silicon-based components

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Translated title of the contribution	Influence of deposited metal structures on the failure mechanisms of silicon-based components
Original language	English
Pages (from-to)	4371-4380
Journal	Journal of the European Ceramic Society
Volume	32
Publication status	Published - 2012

Cite this

@article{26ae5a02ace54faba7d039859b2324cf,

title = "Influence of deposited metal structures on the failure mechanisms of silicon-based components",

author = "Marco Deluca and {Bermejo Moratinos}, Raul and Martin Pletz and Manfred Wie{\ss}ner and Peter Supancic and Robert Danzer",

year = "2012",

language = "English",

volume = "32",

pages = "4371--4380",

journal = "Journal of the European Ceramic Society",

issn = "0955-2219",

publisher = "Elsevier",

}

TY - JOUR

T1 - Influence of deposited metal structures on the failure mechanisms of silicon-based components

AU - Deluca, Marco

AU - Bermejo Moratinos, Raul

AU - Pletz, Martin

AU - Wießner, Manfred

AU - Supancic, Peter

AU - Danzer, Robert

PY - 2012

Y1 - 2012

M3 - Article

SN - 0955-2219

VL - 32

SP - 4371

EP - 4380

JO - Journal of the European Ceramic Society

JF - Journal of the European Ceramic Society

ER -