Influence of CrN and AlN layer thicknesses on structure and mechanical properties of CrN/AlN superlattices

Manfred Schlögl, Bernhard Mayer, J. Paulitsch, P. Mayrhofer

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39 Citations (Scopus)
Translated title of the contributionInfluence of CrN and AlN layer thicknesses on structure and mechanical properties of CrN/AlN superlattices
Original languageEnglish
Pages (from-to)375-379
JournalThin solid films
Volume545
DOIs
Publication statusPublished - 2013

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