Influence of Annealing Treatments on the Adhesion Metal Barrier Layers

Andreas Kleinbichler, J. Zechner, Megan Cordill

Research output: Contribution to conference › Poster › Research › peer-review

Original language	English
Publication status	Published - 2016
Event	Gordon Research Conference on Thin Film & Small Scale Mechanical Behavior, GRC 2016 - Lewiston, United States Duration: 24 Jul 2016 → 29 Jul 2016

Conference	Gordon Research Conference on Thin Film & Small Scale Mechanical Behavior, GRC 2016
Country/Territory	United States
City	Lewiston
Period	24/07/16 → 29/07/16

Cite this

@conference{a20a3ec4d08f468e87b8aedffc46de61,

title = "Influence of Annealing Treatments on the Adhesion Metal Barrier Layers",

author = "Andreas Kleinbichler and J. Zechner and Megan Cordill",

year = "2016",

language = "English",

note = "Gordon Research Conference on Thin Film & Small Scale Mechanical Behavior, GRC 2016 ; Conference date: 24-07-2016 Through 29-07-2016",

}