Influence of Al and Si content on structure and mechanical properties of arc evaporated Al-Cr-Si-N thin films

Christian Tritremmel, Rostislav Daniel, M Lechthaler, P Pocik, Christian Mitterer

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41 Citations (Scopus)
Translated title of the contributionInfluence of Al and Si content on structure and mechanical properties of arc evaporated Al-Cr-Si-N thin films
Original languageEnglish
Pages (from-to)403-409
JournalThin solid films
Volume534
DOIs
Publication statusPublished - 2013

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