Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

Julia Pachlhofer; Aitana Tarazaga Martin-Luengo; Robert Franz; Enrico Franzke; H. Köstenbauer; Jörg Winkler; Alberta Bonanni; Christian Mitterer

doi:http://dx.doi.org/10.1116/1.4973214

Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

Julia Pachlhofer, Aitana Tarazaga Martin-Luengo, Robert Franz, Enrico Franzke, H. Köstenbauer, Jörg Winkler, Alberta Bonanni, Christian Mitterer

Research output: Contribution to journal › Article › Research › peer-review

11 Citations (Scopus)

Original language	English
Pages (from-to)	021504-1 - 021504-8
Number of pages	8
Journal	Journal of vacuum science & technology / A (JVST)
Volume	35
Issue number	2
DOIs	https://doi.org/10.1116/1.4973214
Publication status	Published - 2017

Access to Document

http://dx.doi.org/10.1116/1.4973214

Cite this

@article{a4282da8b07f4d798794e0fe39e6c366,

title = "Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties",

author = "Julia Pachlhofer and Martin-Luengo, {Aitana Tarazaga} and Robert Franz and Enrico Franzke and H. K{\"o}stenbauer and J{\"o}rg Winkler and Alberta Bonanni and Christian Mitterer",

year = "2017",

doi = "http://dx.doi.org/10.1116/1.4973214",

language = "English",

volume = "35",

pages = "021504--1 -- 021504--8",

journal = "Journal of vacuum science & technology / A (JVST)",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "2",

}

TY - JOUR

T1 - Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

AU - Pachlhofer, Julia

AU - Martin-Luengo, Aitana Tarazaga

AU - Franz, Robert

AU - Franzke, Enrico

AU - Köstenbauer, H.

AU - Winkler, Jörg

AU - Bonanni, Alberta

AU - Mitterer, Christian

PY - 2017

Y1 - 2017

U2 - http://dx.doi.org/10.1116/1.4973214

DO - http://dx.doi.org/10.1116/1.4973214

M3 - Article

SN - 0734-2101

VL - 35

SP - 021504-1 - 021504-8

JO - Journal of vacuum science & technology / A (JVST)

JF - Journal of vacuum science & technology / A (JVST)

IS - 2

ER -