Industrial-scale sputter deposition of Cr1-xAlxN coatings with 0.21<x <0.74 from segmented targets

Thomas Weirather, Christoph Czettl, P. Polcik, M. Kathrein, Christian Mitterer

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Translated title of the contribution	Industrial-scale sputter deposition of Cr1-xAlxN coatings with 0.21<x <0.74 from segmented targets
Original language	English
Pages (from-to)	303-310
Journal	Surface & coatings technology
Volume	232
DOIs	https://doi.org/10.1016/j.surfcoat.2013.05.022
Publication status	Published - 2013

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title = "Industrial-scale sputter deposition of Cr1-xAlxN coatings with 0.21<x <0.74 from segmented targets",

author = "Thomas Weirather and Christoph Czettl and P. Polcik and M. Kathrein and Christian Mitterer",

year = "2013",

doi = "10.1016/j.surfcoat.2013.05.022",

language = "English",

volume = "232",

pages = "303--310",

journal = "Surface & coatings technology",

issn = "0257-8972",

publisher = "Elsevier",

}

TY - JOUR

T1 - Industrial-scale sputter deposition of Cr1-xAlxN coatings with 0.21<x <0.74 from segmented targets

AU - Weirather, Thomas

AU - Czettl, Christoph

AU - Polcik, P.

AU - Kathrein, M.

AU - Mitterer, Christian

PY - 2013

Y1 - 2013

U2 - 10.1016/j.surfcoat.2013.05.022

DO - 10.1016/j.surfcoat.2013.05.022

M3 - Article

SN - 0257-8972

VL - 232

SP - 303

EP - 310

JO - Surface & coatings technology

JF - Surface & coatings technology

ER -