High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering

M. Jilek, Jr., M. Jilek,, Francisca Mendez Martin, P.H. Mayrhofer, S. Veprek

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Translated title of the contribution	High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering
Original language	English
Pages (from-to)	361-368
Journal	Thin solid films
Volume	556
DOIs	https://doi.org/10.1016/j.tsf.2014.01.059
Publication status	Published - 2014

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@article{3a16781bfa1747faaceeec9b48369ae1,

title = "High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering",

author = "{Jilek, Jr.}, M. and M. Jilek, and {Mendez Martin}, Francisca and P.H. Mayrhofer and S. Veprek",

year = "2014",

doi = "10.1016/j.tsf.2014.01.059",

language = "English",

volume = "556",

pages = "361--368",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier",

}

TY - JOUR

T1 - High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering

AU - Jilek, Jr., M.

AU - Jilek,, M.

AU - Mendez Martin, Francisca

AU - Mayrhofer, P.H.

AU - Veprek, S.

PY - 2014

Y1 - 2014

U2 - 10.1016/j.tsf.2014.01.059

DO - 10.1016/j.tsf.2014.01.059

M3 - Article

SN - 0040-6090

VL - 556

SP - 361

EP - 368

JO - Thin solid films

JF - Thin solid films

ER -