Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films

Felipe C. da Silva; Matheus Tunes; Philip D. Edmondson; Nelson B. Lima; Julio C. Sagás; Luis C. Fontana; Cláudio G. Schön

doi:10.1007/s42452-020-2617-3

Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films

Felipe C. da Silva, Matheus Tunes, Philip D. Edmondson, Nelson B. Lima, Julio C. Sagás, Luis C. Fontana, Cláudio G. Schön

Chair of Nonferrous Metallurgy (520)

Research output: Contribution to journal › Article › Research › peer-review

5 Citations (Scopus)

Original language	Undefined/Unknown
Journal	SN applied sciences
DOIs	https://doi.org/10.1007/s42452-020-2617-3
Publication status	Published - May 2020

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10.1007/s42452-020-2617-3

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@article{3069202124c44716add8bf23773a5510,

title = "Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films",

author = "{da Silva}, {Felipe C.} and Matheus Tunes and Edmondson, {Philip D.} and Lima, {Nelson B.} and Sag{\'a}s, {Julio C.} and Fontana, {Luis C.} and Sch{\"o}n, {Cl{\'a}udio G.}",

year = "2020",

month = may,

doi = "10.1007/s42452-020-2617-3",

language = "Undefined/Unknown",

journal = "SN applied sciences ",

issn = "2523-3971 ",

publisher = "Springer International Publishing",

}

TY - JOUR

T1 - Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films

AU - da Silva, Felipe C.

AU - Tunes, Matheus

AU - Edmondson, Philip D.

AU - Lima, Nelson B.

AU - Sagás, Julio C.

AU - Fontana, Luis C.

AU - Schön, Cláudio G.

PY - 2020/5

Y1 - 2020/5

UR - http://dx.doi.org/10.1007/s42452-020-2617-3

U2 - 10.1007/s42452-020-2617-3

DO - 10.1007/s42452-020-2617-3

M3 - Article

SN - 2523-3971

JO - SN applied sciences

JF - SN applied sciences

ER -

Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films

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