GISAXS experiments on Al-coated Si-Wafers with expected “hillocks”

Translated title of the contribution: GISAXS experiments on Al-coated Si-Wafers with expected “hillocks”

Richard Görgl, Gerhard Dehm

Research output: Book/Report › Commissioned report › Transfer › peer-review

Translated title of the contributionGISAXS experiments on Al-coated Si-Wafers with expected “hillocks”
Original languageGerman
PublisherUnknown Publisher
Publication statusPublished - 2006

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