Evolution of the microstructure of sputter deposited TaAlON thin films with increasing oxygen partial pressure

Nina Schalk, Christian Saringer, Alexander Fian, Velislava Terziyska, J. Julin, Michael Tkadletz

Research output: Contribution to journal › Article › Research › peer-review

Original language	English
Pages (from-to)	1-7
Journal	Surface & coatings technology
Volume	2021
Issue number	418
DOIs	https://doi.org/10.1016/j.surfcoat.2021.127237
Publication status	Published - 2021

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title = "Evolution of the microstructure of sputter deposited TaAlON thin films with increasing oxygen partial pressure",

author = "Nina Schalk and Christian Saringer and Alexander Fian and Velislava Terziyska and J. Julin and Michael Tkadletz",

year = "2021",

doi = "10.1016/j.surfcoat.2021.127237",

language = "English",

volume = "2021",

pages = "1--7",

journal = "Surface & coatings technology",

issn = "0257-8972",

publisher = "Elsevier",

number = "418",

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TY - JOUR

T1 - Evolution of the microstructure of sputter deposited TaAlON thin films with increasing oxygen partial pressure

AU - Schalk, Nina

AU - Saringer, Christian

AU - Fian, Alexander

AU - Terziyska, Velislava

AU - Julin, J.

AU - Tkadletz, Michael

PY - 2021

Y1 - 2021

U2 - 10.1016/j.surfcoat.2021.127237

DO - 10.1016/j.surfcoat.2021.127237

M3 - Article

SN - 0257-8972

VL - 2021

SP - 1

EP - 7

JO - Surface & coatings technology

JF - Surface & coatings technology

IS - 418

ER -