Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography

Marlene Mühlbacher; Francisca Mendez Martin; Bernhard  Sartory; Livia Chitu; Jun Lu; Nina Schalk; Jozef Keckes; Lars Hultman; Christian Mitterer

Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography

Marlene Mühlbacher, Francisca Mendez Martin, Bernhard Sartory, Livia Chitu, Jun Lu, Nina Schalk, Jozef Keckes, Lars Hultman, Christian Mitterer

Research output: Contribution to conference › Presentation › Research › peer-review

Original language	English
Publication status	Published - 2015
Event	42nd International Conference on Metallurgical Coatings and Thin Films - San Diego, United States Duration: 20 Apr 2015 → 24 Apr 2015 https://www2.avs.org/conferences/icmctf/

Conference

Conference	42nd International Conference on Metallurgical Coatings and Thin Films
Country/Territory	United States
City	San Diego
Period	20/04/15 → 24/04/15
Internet address	https://www2.avs.org/conferences/icmctf/

42nd International Conference on Metallurgical Coatings and Thin Films
Marlene Mühlbacher (Speaker)
24 Apr 2015
Activity: Participating in or organising an event › Participation in conference

Cite this

@conference{928c76d9abd744939265f08465f59245,

title = "Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography",

author = "Marlene M{\"u}hlbacher and {Mendez Martin}, Francisca and Bernhard Sartory and Livia Chitu and Jun Lu and Nina Schalk and Jozef Keckes and Lars Hultman and Christian Mitterer",

year = "2015",

language = "English",

note = "42nd International Conference on Metallurgical Coatings and Thin Films ; Conference date: 20-04-2015 Through 24-04-2015",

url = "https://www2.avs.org/conferences/icmctf/",

}

Mühlbacher, M, Mendez Martin, F, Sartory, B, Chitu, L, Lu, J, Schalk, N , Keckes, J, Hultman, L & Mitterer, C 2015, 'Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography', 42nd International Conference on Metallurgical Coatings and Thin Films, San Diego, United States, 20/04/15 - 24/04/15.

Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography. / Mühlbacher, Marlene; Mendez Martin, Francisca; Sartory, Bernhard et al.
2015. 42nd International Conference on Metallurgical Coatings and Thin Films, San Diego, United States.

Research output: Contribution to conference › Presentation › Research › peer-review

TY - CONF

T1 - Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography

AU - Mühlbacher, Marlene

AU - Mendez Martin, Francisca

AU - Sartory, Bernhard

AU - Chitu, Livia

AU - Lu, Jun

AU - Schalk, Nina

AU - Keckes, Jozef

AU - Hultman, Lars

AU - Mitterer, Christian

PY - 2015

Y1 - 2015

M3 - Presentation

T2 - 42nd International Conference on Metallurgical Coatings and Thin Films

Y2 - 20 April 2015 through 24 April 2015

ER -

Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography

Conference

Activities

42nd International Conference on Metallurgical Coatings and Thin Films

Cite this