Electromechanical properties of cathodic arc deposited high entropy alloy thin films on polymer substrates

Ao Xia, Oleksandr Glushko, Megan Cordill, Robert Franz

Research output: Contribution to journal › Article › Research › peer-review

8 Citations (Scopus)

Original language	English
Pages (from-to)	010601-1-010601-4
Journal	Journal of vacuum science & technology / A (JVST)
DOIs	https://doi.org/10.1116/1.5058729
Publication status	Published - 2018

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title = "Electromechanical properties of cathodic arc deposited high entropy alloy thin films on polymer substrates",

author = "Ao Xia and Oleksandr Glushko and Megan Cordill and Robert Franz",

year = "2018",

doi = "10.1116/1.5058729",

language = "English",

pages = "010601--1--010601--4",

journal = "Journal of vacuum science & technology / A (JVST)",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

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TY - JOUR

T1 - Electromechanical properties of cathodic arc deposited high entropy alloy thin films on polymer substrates

AU - Xia, Ao

AU - Glushko, Oleksandr

AU - Cordill, Megan

AU - Franz, Robert

PY - 2018

Y1 - 2018

U2 - 10.1116/1.5058729

DO - 10.1116/1.5058729

M3 - Article

SN - 0734-2101

SP - 010601-1-010601-4

JO - Journal of vacuum science & technology / A (JVST)

JF - Journal of vacuum science & technology / A (JVST)

ER -