Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings

V. Edlmayr; T. P. Harzer; R. Hoffmann; D. Kiener; C. Scheu; C. Mitterer

doi:10.1116/1.3584803

Effects of thermal annealing on the microstructure of sputtered Al ₂O₃ coatings

V. Edlmayr, T. P. Harzer, R. Hoffmann, D. Kiener, C. Scheu, C. Mitterer

Ludwig-Maximilians-University

Research output: Contribution to journal › Article › Research › peer-review

24 Citations (Scopus)

Original language	English
Article number	041506
Journal	Journal of vacuum science & technology / A (JVST)
Volume	29
Issue number	4
DOIs	https://doi.org/10.1116/1.3584803
Publication status	Published - Jul 2011

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Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings

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Effects of thermal annealing on the microstructure of sputtered Al ₂O₃ coatings