Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings

Viktoria Edlmayr, T.P. Harzer, R. Hoffmann, Daniel Kiener, C. Scheu, Christian Mitterer

Research output: Contribution to journal › Article › Research › peer-review

Translated title of the contribution	Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings
Original language	English
Pages (from-to)	0415061-0415068
Journal	Journal of vacuum science & technology / A (JVST)
Publication status	Published - 2011

Cite this

@article{b0f3fe8e259348a5b391b704e804dc77,

title = "Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings",

author = "Viktoria Edlmayr and T.P. Harzer and R. Hoffmann and Daniel Kiener and C. Scheu and Christian Mitterer",

year = "2011",

language = "English",

pages = "0415061--0415068",

journal = "Journal of vacuum science & technology / A (JVST)",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

}

TY - JOUR

T1 - Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings

AU - Edlmayr, Viktoria

AU - Harzer, T.P.

AU - Hoffmann, R.

AU - Kiener, Daniel

AU - Scheu, C.

AU - Mitterer, Christian

PY - 2011

Y1 - 2011

M3 - Article

SN - 0734-2101

SP - 415061

EP - 415068

JO - Journal of vacuum science & technology / A (JVST)

JF - Journal of vacuum science & technology / A (JVST)

ER -