Effect of growth conditions on interface stability and thermophysical properties of sputtered Cu films on Si with and without WTi barrier layers

Imane Souli, Velislava Terziyska, Jozef Keckes, W. Robl, J. Zechner, Christian Mitterer

Research output: Contribution to journalArticleResearchpeer-review

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)022201-1 - 022201-11
Number of pages11
JournalJournal of vacuum science & technology / B (JVST)
Publication statusPublished - 2017

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