Original language | English |
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Article number | 041517 |
Number of pages | 8 |
Journal | Journal of vacuum science & technology / A (JVST) |
Volume | 34 |
Issue number | 4 |
Publication status | Published - 1 Jul 2016 |
Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN
Christian Saringer, Robert Franz, Katrin Zorn, Christian Mitterer
Research output: Contribution to journal › Article › Research › peer-review
9
Citations
(Scopus)