Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

Christian Saringer, Robert Franz, Katrin Zorn, Christian Mitterer

Research output: Contribution to journalArticleResearchpeer-review

9 Citations (Scopus)
Original languageEnglish
Article number041517
Number of pages8
JournalJournal of vacuum science & technology / A (JVST)
Volume34
Issue number4
Publication statusPublished - 1 Jul 2016

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