Cu diffusion in single-crystal and polycrystalline TiN barrier layers: A high-resolution experimental study supported by first-principles calculations

Marlene Mühlbacher, Anton S. Bochkarev, Francisca Mendez Martin, Bernhard Sartory, Livia Chitu, Maxim Popov, Peter Puschnig, Jürgen Spitaler, Hong Ding, Nina Schalk, Jun Lu, Lars Hultman, Christian Mitterer

Research output: Contribution to journalArticleResearchpeer-review

25 Citations (Scopus)
Original languageEnglish
Pages (from-to)085307-1 - 085307-11
JournalJournal of applied physics
Publication statusPublished - 2015

Cite this