Cu diffusion in single-crystal and polycrystalline TiN barrier layers: A high-resolution experimental study supported by first-principles calculations

Marlene Mühlbacher; Anton S. Bochkarev; Francisca Mendez Martin; Bernhard Sartory; Livia Chitu; Maxim Popov; Peter Puschnig; Jürgen Spitaler; Hong Ding; Nina Schalk; Jun Lu; Lars Hultman; Christian Mitterer

Cu diffusion in single-crystal and polycrystalline TiN barrier layers: A high-resolution experimental study supported by first-principles calculations

Marlene Mühlbacher, Anton S. Bochkarev, Francisca Mendez Martin, Bernhard Sartory, Livia Chitu, Maxim Popov, Peter Puschnig, Jürgen Spitaler, Hong Ding, Nina Schalk, Jun Lu, Lars Hultman, Christian Mitterer

Research output: Contribution to journal › Article › Research › peer-review

25 Citations (Scopus)

Original language	English
Pages (from-to)	085307-1 - 085307-11
Journal	Journal of applied physics
Volume	118
Publication status	Published - 2015

Cite this

Mühlbacher, M., Bochkarev, A. S., Mendez Martin, F., Sartory, B., Chitu, L., Popov, M., Puschnig, P., Spitaler, J., Ding, H., Schalk, N., Lu, J., Hultman, L., & Mitterer, C. (2015). Cu diffusion in single-crystal and polycrystalline TiN barrier layers: A high-resolution experimental study supported by first-principles calculations. Journal of applied physics, 118, 085307-1 - 085307-11.

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title = "Cu diffusion in single-crystal and polycrystalline TiN barrier layers: A high-resolution experimental study supported by first-principles calculations",

author = "Marlene M{\"u}hlbacher and Bochkarev, {Anton S.} and {Mendez Martin}, Francisca and Bernhard Sartory and Livia Chitu and Maxim Popov and Peter Puschnig and J{\"u}rgen Spitaler and Hong Ding and Nina Schalk and Jun Lu and Lars Hultman and Christian Mitterer",

year = "2015",

language = "English",

volume = "118",

pages = "085307--1 -- 085307--11",

journal = "Journal of applied physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

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Mühlbacher, M, Bochkarev, AS, Mendez Martin, F, Sartory, B, Chitu, L, Popov, M, Puschnig, P, Spitaler, J, Ding, H, Schalk, N, Lu, J, Hultman, L & Mitterer, C 2015, 'Cu diffusion in single-crystal and polycrystalline TiN barrier layers: A high-resolution experimental study supported by first-principles calculations', Journal of applied physics, vol. 118, pp. 085307-1 - 085307-11.

Cu diffusion in single-crystal and polycrystalline TiN barrier layers: A high-resolution experimental study supported by first-principles calculations. / Mühlbacher, Marlene; Bochkarev, Anton S.; Mendez Martin, Francisca et al.
In: Journal of applied physics, Vol. 118, 2015, p. 085307-1 - 085307-11.

Research output: Contribution to journal › Article › Research › peer-review

TY - JOUR

T1 - Cu diffusion in single-crystal and polycrystalline TiN barrier layers: A high-resolution experimental study supported by first-principles calculations

AU - Mühlbacher, Marlene

AU - Bochkarev, Anton S.

AU - Mendez Martin, Francisca

AU - Sartory, Bernhard

AU - Chitu, Livia

AU - Popov, Maxim

AU - Puschnig, Peter

AU - Spitaler, Jürgen

AU - Ding, Hong

AU - Schalk, Nina

AU - Lu, Jun

AU - Hultman, Lars

AU - Mitterer, Christian

PY - 2015

Y1 - 2015

M3 - Article

SN - 0021-8979

VL - 118

SP - 085307-1 - 085307-11

JO - Journal of applied physics

JF - Journal of applied physics

ER -