Cross-sectional stress distribution in AlxGa1-xN heterostructure on Si(111) substrate characterized by ion beam layer removal method and precession electron diffraction

Michael Reisinger, Jakub Zalesak, Rostislav Daniel, M. Tomberger, J.K. Weiss, A.D. Darbal, M. Petrenec, J. Zechner, I. Daumiller, Werner Ecker, Bernhard Sartory, Jozef Keckes

Research output: Contribution to journalArticleResearchpeer-review

9 Citations (Scopus)
Original languageEnglish
Pages (from-to)476-481
Number of pages6
JournalMaterials and Design
Volume106
DOIs
Publication statusPublished - 2016

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