Compressive and tensile bending of sputter deposited Al/Mo bilayers

Patrice Kreiml, Martin Rausch, Velislava Terziyska, Jörg Winkler, Christian Mitterer, Megan Cordill

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12 Citations (Scopus)


Cyclic bending tests of magnetron sputter-deposited Al/Mo bilayer thin films on flexible substrates were performed with a custom-built bending apparatus to evaluate the reliability of possible applications for metal wiring electrodes such as signal and data bus lines in flexible electronics. Intermittent measurements of mechanical damage and electrical resistance were performed to elucidate the damage evolution of Al/Mo bilayers with increasing cycle numbers. It was found that a 3:1 thickness ratio would have an extremely long lifetime when only compressive bending is applied for strains <1.3% (2 mm radius, 50 μm substrate thickness).

Original languageEnglish
Pages (from-to)367-371
Number of pages5
JournalScripta materialia
Issue numberMarch
Publication statusPublished - 15 Mar 2019

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