Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy

C. Schubert; V. Hoffmann; A. Kümmel; J. Sinn; M. Härtel; A. Reuther; M. Thomalla; T. Gemming; J. Eckert; C. Leyens

doi:10.1039/c6ja00251j

Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy

C. Schubert, V. Hoffmann, A. Kümmel, J. Sinn, M. Härtel, A. Reuther, M. Thomalla, T. Gemming, J. Eckert, C. Leyens

Montanuniversität

Research output: Contribution to journal › Article › Research › peer-review

4 Citations (Scopus)

Original language	English
Pages (from-to)	2207-2212
Number of pages	6
Journal	Journal of analytical atomic spectrometry
Volume	31
Issue number	11
DOIs	https://doi.org/10.1039/c6ja00251j
Publication status	Published - 1 Nov 2016

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title = "Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy",

author = "C. Schubert and V. Hoffmann and A. K{\"u}mmel and J. Sinn and M. H{\"a}rtel and A. Reuther and M. Thomalla and T. Gemming and J. Eckert and C. Leyens",

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AU - Schubert, C.

AU - Hoffmann, V.

AU - Kümmel, A.

AU - Sinn, J.

AU - Härtel, M.

AU - Reuther, A.

AU - Thomalla, M.

AU - Gemming, T.

AU - Eckert, J.

AU - Leyens, C.

PY - 2016/11/1

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EP - 2212

JO - Journal of analytical atomic spectrometry

JF - Journal of analytical atomic spectrometry

IS - 11

ER -

Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy

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